Implementation of the IMEC-Clean in advanced CMOS manufacturing

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Authors
Meuris, Marc; Arnauts, Sophia; Cornelissen, Ingrid; Kenis, Karine; Lux, Marcel; De Gendt, Stefan; Mertens, Paul; Teerlinck, Ivo; Vos, Rita; Loewenstein, Lee; Heyns, Marc; Wolke, K.
Conference
Proceedings 1999 IEEE International Symposium on Semiconductor Manufacturing Conference
Title
Implementation of the IMEC-Clean in advanced CMOS manufacturing
Publication type
Proceedings paper
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