Authors

Kondo, Tsuyoshi; Ban, N.; Ebizuka, Y.; Toyoda, Y.; Yamada, Y.; Kashiwa, T.; Koike, H.; Shindo, H.; Charley, Anne-Laure; Saib, Mohamed; Van Roey, Frieda; De Bisschop, Peter; De Simone, Danilo; Beral, Christophe; Lorusso, Gian

Conference

Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

Title

Massive metrology and inspection solution for EUV by area inspection SEM with machine learning technology

Publication type

Proceedings paper