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Challenges in uniform etching of Ruthenium

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorPacco, Antoine
dc.contributor.authorAltamirano Sanchez, Efrain
dc.date.accessioned2021-10-31T09:23:53Z
dc.date.available2021-10-31T09:23:53Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36887
dc.sourceIIOimport
dc.titleChallenges in uniform etching of Ruthenium
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.conferenceThe Surface Preparation and Cleaning Conference (SPCC 2021)
dc.source.conferencedate8/06/2021
dc.source.conferencelocationVirtual Conference Belgium
imec.availabilityPublished - imec


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