Authors

Neimash, V. B.; Puzenko, O. O.; Kabaldin, O. M.; Kraitchinskii, A. M.; Kras'ko, M. M.; Claeys, Cor; Simoen, Eddy

Conference

Proceedings of the 8th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST

Title

The nature of precursors for the thermal donor formation in silicon

Publication type

Proceedings paper

Embargo date

9999-12-31