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The nature of precursors for the thermal donor formation in silicon

dc.contributor.authorNeimash, V. B.
dc.contributor.authorPuzenko, O. O.
dc.contributor.authorKabaldin, O. M.
dc.contributor.authorKraitchinskii, A. M.
dc.contributor.authorKras'ko, M. M.
dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-14T11:31:28Z
dc.date.available2021-10-14T11:31:28Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3695
dc.sourceIIOimport
dc.titleThe nature of precursors for the thermal donor formation in silicon
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage351
dc.source.endpage356
dc.source.conferenceProceedings of the 8th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology - GADEST
dc.source.conferencedate25/09/1999
dc.source.conferencelocationH��r Sweden
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vol. 69-70


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