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Assessment of N-type and P-type doping in (Al,Ga)N heterostructures by Scanning probe microscopy techniques

dc.contributor.authorMinj, Albert
dc.contributor.authorZhao, Ming
dc.contributor.authorBakeroot, Benoit
dc.contributor.authorParedis, Kristof
dc.contributor.authorWouters, Lennaert
dc.contributor.authorHantschel, Thomas
dc.contributor.authorDecoutere, Stefaan
dc.date.accessioned2021-10-31T09:56:16Z
dc.date.available2021-10-31T09:56:16Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36981
dc.sourceIIOimport
dc.titleAssessment of N-type and P-type doping in (Al,Ga)N heterostructures by Scanning probe microscopy techniques
dc.typeOral presentation
dc.contributor.imecauthorMinj, Albert
dc.contributor.imecauthorZhao, Ming
dc.contributor.imecauthorBakeroot, Benoit
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecMinj, Albert::0000-0003-0878-3276
dc.contributor.orcidimecZhao, Ming::0000-0002-0856-851X
dc.contributor.orcidimecBakeroot, Benoit::0000-0003-4392-1777
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewno
dc.source.conferenceMRS Spring 2021
dc.source.conferencedate17/04/2021
dc.source.conferencelocationvirtual virtual
imec.availabilityPublished - imec


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