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Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling

dc.contributor.authorOniki, Yusuke
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorHideaki, Iino
dc.contributor.authorCott, Daire
dc.contributor.authorChan, BT
dc.contributor.authorSebaai, Farid
dc.contributor.authorHopf, Toby
dc.contributor.authorDekkers, Harold
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-31T10:13:14Z
dc.date.available2021-10-31T10:13:14Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37028
dc.sourceIIOimport
dc.titleChallenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling
dc.typeProceedings paper
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorHideaki, Iino
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.source.peerreviewyes
dc.source.beginpage119
dc.source.endpage126
dc.source.conferenceInternational Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate22/09/2020
dc.source.conferencelocationMechelen Belgium
dc.identifier.urlhttps://doi.org/10.4028/www.scientific.net/SSP.314.119
imec.availabilityPublished - imec
imec.internalnotesSolid State Phenomena Vol. 314


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