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Atomic layers deposited nano-mechanical resonators for silicon photonics

dc.contributor.authorRajendran, Khannan
dc.contributor.authorPetit, R.
dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-31T10:36:44Z
dc.date.available2021-10-31T10:36:44Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37091
dc.sourceIIOimport
dc.titleAtomic layers deposited nano-mechanical resonators for silicon photonics
dc.typeOral presentation
dc.contributor.imecauthorRajendran, Khannan
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceFrontiers of Nanomechanical Systems Workshop 2021
dc.source.conferencedate19/01/2021
dc.source.conferencelocationBarcelona Spain
dc.identifier.urlhttps://www.photonics.intec.ugent.be/publications/publications.asp?ID=4670
imec.availabilityPublished - open access
imec.internalnotesposter 25


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