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Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes

dc.contributor.authorStorm, Wolfgang
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorMeuris, Marc
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorHeyns, Marc
dc.contributor.authorPolleunis, C.
dc.contributor.authorBertrand, P.
dc.date.accessioned2021-09-29T12:48:33Z
dc.date.available2021-09-29T12:48:33Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/371
dc.sourceIIOimport
dc.titleDegradation of clean Si-surfaces due to storage in clean (?) wafer boxes
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage367
dc.source.endpage370
dc.source.conferenceProceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate19/09/1994
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access


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