Publication:

First demonstration of sub-12 nm gate last IGZO-TFTs with oxygen tunnel architecture for front gate devices

Date

2021

Proceedings Paper

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Author(s)

Subhechha, Subhali

;

Rassoul, Nouredine

;

Belmonte, Attilio

;

Delhougne, Romain

;

Donadio, Gabriele Luca

;

Banerjee, Kaustuv

;

Dekkers, Harold

;

van Setten, Michiel

;

;

Puliyalil, Harinarayanan

;

;

;

;

Tsvetanova, Diana

;

Bazzazian, Nina

;

;

Vaisman Chasin, Adrian

;

Heijlen, Jeroen

;

Kar, Gouri Sankar

Statistics

2311 since deposited on 2021-10-31

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Acq. date: 2026-02-26