Show simple item record

First demonstration of sub-12 nm gate last IGZO-TFTs with oxygen tunnel architecture for front gate devices

dc.contributor.authorSubhechha, Subhali
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorDelhougne, Romain
dc.contributor.authorDonadio, Gabriele Luca
dc.contributor.authorBanerjee, Kaustuv
dc.contributor.authorDekkers, Harold
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorMao, Ming
dc.contributor.authorPuliyalil, Harinarayanan
dc.contributor.authorKundu, Shreya
dc.contributor.authorPak, Murat
dc.contributor.authorTeugels, Lieve
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorBazzazian, Nina
dc.contributor.authorKlijs, Lars
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorHeijlen, Jeroen
dc.contributor.authorKar, Gouri Sankar
dc.date.accessioned2021-10-31T11:29:12Z
dc.date.available2021-10-31T11:29:12Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37215
dc.sourceIIOimport
dc.titleFirst demonstration of sub-12 nm gate last IGZO-TFTs with oxygen tunnel architecture for front gate devices
dc.typeProceedings paper
dc.contributor.imecauthorSubhechha, Subhali
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorDonadio, Gabriele Luca
dc.contributor.imecauthorBanerjee, Kaustuv
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorMao, Ming
dc.contributor.imecauthorPuliyalil, Harinarayanan
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorPak, Murat
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorBazzazian, Nina
dc.contributor.imecauthorKlijs, Lars
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorHeijlen, Jeroen
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecBanerjee, Kaustuv::0000-0001-8003-6211
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecPuliyalil, Harinarayanan::0000-0002-9749-5307
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecTsvetanova, Diana::0000-0002-5632-5539
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.source.peerreviewyes
dc.source.conference2021 Symposium on VLSI Technology
dc.source.conferencedate13/06/2021
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9508749
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record