Publication:
Towards Si-cap-free SiGe passivation: impact of surface preparation on low-pressure oxidation of SiGe
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2041 since deposited on 2021-10-31
3last month
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Acq. date: 2025-12-18
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Views
2041 since deposited on 2021-10-31
3last month
1last week
Acq. date: 2025-12-18
Citations