EISBN
978-1-6654-1373-2
ISBN
978-1-6654-1373-2
ISSN
na
Conference
22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Journal
na
Title
A comparative study of acoustic isolation configurations for pMUT array-based applications
Publication type
Proceedings paper
Embargo date
9999-12-31