dc.contributor.author | Vysotskyi, Bogdan | |
dc.contributor.author | Haouari, Rachid | |
dc.contributor.author | Weekers, Bart | |
dc.contributor.author | Keulemans, Grim | |
dc.contributor.author | Rochus, Veronique | |
dc.contributor.author | Brondani Torri, Guilherme | |
dc.date.accessioned | 2022-05-10T09:04:28Z | |
dc.date.available | 2021-11-02T15:55:10Z | |
dc.date.available | 2022-05-06T11:59:03Z | |
dc.date.available | 2022-05-10T09:04:28Z | |
dc.date.issued | 2021 | |
dc.identifier.isbn | 978-1-6654-1373-2 | |
dc.identifier.issn | na | |
dc.identifier.other | WOS:000706452600041 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37434.3 | |
dc.source | WOS | |
dc.title | A comparative study of acoustic isolation configurations for pMUT array-based applications | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vysotskyi, Bogdan | |
dc.contributor.imecauthor | Haouari, Rachid | |
dc.contributor.imecauthor | Weekers, Bart | |
dc.contributor.imecauthor | Keulemans, Grim | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.contributor.imecauthor | Brondani Torri, Guilherme | |
dc.contributor.orcidimec | Vysotskyi, Bogdan::0000-0003-4050-6236 | |
dc.contributor.orcidimec | Weekers, Bart::0000-0001-5949-8411 | |
dc.contributor.orcidimec | Keulemans, Grim::0000-0001-6896-7275 | |
dc.contributor.orcidimec | Rochus, Veronique::0000-0001-9680-5724 | |
dc.contributor.orcidimec | Brondani Torri, Guilherme::0000-0002-5450-658X | |
dc.contributor.orcidimec | Haouari, Rachid::0000-0003-4809-2023 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1109/EuroSimE52062.2021.9410867 | |
dc.identifier.eisbn | 978-1-6654-1373-2 | |
dc.source.numberofpages | 5 | |
dc.source.peerreview | yes | |
dc.source.conference | 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) | |
dc.source.conferencedate | APR 19-22, 2021 | |
dc.source.conferencelocation | Online | |
dc.source.journal | na | |
imec.availability | Published - open access | |