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Conference contributions
Transient pull-in simulation of electrostatic microvalve with physics-based contact function
Publication:
Transient pull-in simulation of electrostatic microvalve with physics-based contact function
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Date
2021-04-26
Proceedings Paper
https://doi.org/10.1109/EuroSimE52062.2021.9410843
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1.01 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Keulemans, Grim
;
Liang, Boshen
;
Podkovskiy, Alexey
;
Jambaldinni, Shruti
;
Wysocka, Dominika
;
Zhang, Lei
;
Stakenborg, Tim
;
Cheyns, David
;
Heremans, Paul
;
Rochus, Veronique
Journal
2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
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130
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Acq. date: 2025-12-16
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1635
since deposited on 2021-11-02
Acq. date: 2025-12-16
Citations
Metrics
Downloads
130
since deposited on 2021-11-02
28
last month
8
last week
Acq. date: 2025-12-16
Views
1635
since deposited on 2021-11-02
Acq. date: 2025-12-16
Citations