Publication:

Transient pull-in simulation of electrostatic microvalve with physics-based contact function

Date

2021
Proceedings Paper
https://doi.org/10.1109/eurosime52062.2021.9410843
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Accepted version 1.01 MB

Author(s)

Keulemans, Grim  
;
Liang, Boshen  
;
Podkovskiy, Alexey  
;
Jambaldinni, Shruti  
;
Wysocka, Dominika  
;
Zhang, Lei  
;
Stakenborg, Tim  
;
Cheyns, David  
;
Heremans, Paul  
;
Rochus, Veronique  

Journal

2021 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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270 since deposited on 2021-11-02
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1643 since deposited on 2021-11-02
1last month
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Acq. date: 2026-09-19

Citations