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Edge-induced reliability & performance degradation in STT-MRAM: an etch engineering solution

dc.contributor.authorVan Beek, Simon
dc.contributor.authorRao, Siddharth
dc.contributor.authorKundu, Shreya
dc.contributor.authorKim, Woojin
dc.contributor.authorO'Sullivan, Barry J.
dc.contributor.authorCosemans, Stefan
dc.contributor.authorYasin, Farukh
dc.contributor.authorCarpenter, Robert
dc.contributor.authorCouet, Sebastien
dc.contributor.authorSharifi, Shamin H.
dc.contributor.authorJossart, Nico
dc.contributor.authorCrotti, Davide
dc.contributor.authorKar, Gouri
dc.date.accessioned2022-01-28T10:37:52Z
dc.date.available2021-11-02T15:58:24Z
dc.date.available2022-01-28T10:32:56Z
dc.date.available2022-01-28T10:37:52Z
dc.date.issued2021
dc.identifier.issn1541-7026
dc.identifier.otherWOS:000672563100118
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37682.3
dc.sourceWOS
dc.titleEdge-induced reliability & performance degradation in STT-MRAM: an etch engineering solution
dc.typeProceedings paper
dc.contributor.imecauthorVan Beek, Simon
dc.contributor.imecauthorRao, Siddharth
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorKim, Woojin
dc.contributor.imecauthorO'Sullivan, Barry J.
dc.contributor.imecauthorCosemans, Stefan
dc.contributor.imecauthorYasin, Farukh
dc.contributor.imecauthorCarpenter, Robert
dc.contributor.imecauthorCouet, Sebastien
dc.contributor.imecauthorSharifi, Shamin H.
dc.contributor.imecauthorJossart, Nico
dc.contributor.imecauthorCrotti, Davide
dc.contributor.imecauthorKar, Gouri
dc.contributor.orcidimecVan Beek, Simon::0000-0002-2499-4172
dc.contributor.orcidimecRao, Siddharth::0000-0001-6161-3052
dc.contributor.orcidimecCarpenter, Robert::0000-0003-0101-5952
dc.contributor.orcidimecCouet, Sebastien::0000-0001-6436-9593
dc.identifier.doi10.1109/IRPS46558.2021.9405209
dc.identifier.eisbn978-1-7281-6893-7
dc.source.numberofpages5
dc.source.peerreviewyes
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 21-24, 2021
dc.source.conferencelocationMonterey, CA, USA
dc.source.journalna
imec.availabilityPublished - imec


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320.500.12860/37682.3*2022-01-28T10:36:53Zvalidation by library/open access desk
220.500.12860/37682.22021-11-03T12:55:24Zvalidation by imec author
120.500.12860/376822021-11-02T15:58:24Z

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