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A BEEM study of PtSi Schottky contacts on ion-milled Si

dc.contributor.authorRu, Guo-Ping
dc.contributor.authorDetavernier, C.
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorBlondeel, A.
dc.contributor.authorClauws, P.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorCardon, F.
dc.contributor.authorMaex, Karen
dc.contributor.authorQu, X. P.
dc.contributor.authorZhu, S. Y.
dc.contributor.authorLi, Bing-Zong
dc.date.accessioned2021-10-14T11:36:02Z
dc.date.available2021-10-14T11:36:02Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3783
dc.sourceIIOimport
dc.titleA BEEM study of PtSi Schottky contacts on ion-milled Si
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage201
dc.source.endpage206
dc.source.conferenceAdvanced Interconnects and Contacts
dc.source.conferencedate5/04/1999
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 564


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