Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Gas-phase surface proessing prior to 3.2nm gate oxidation
Publication:
Gas-phase surface proessing prior to 3.2nm gate oxidation
Copy permalink
Date
1999
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
3754.pdf
370.29 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ruzyllo, Jerzy
;
Röhr, Erika
;
Baeyens, Martien
;
Bearda, Twan
;
Mertens, Paul
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Views
2001
since deposited on 2021-10-14
2
last month
1
last week
Acq. date: 2026-01-08
Citations
Metrics
Views
2001
since deposited on 2021-10-14
2
last month
1
last week
Acq. date: 2026-01-08
Citations