Authors

Trauwaert, Marie-Astrid; Vanhellemont, Jan; Maes, Herman; Van Bavel, Mieke; Langouche, G.; Clauws, P.

Conference

1st International Conference on Materials for Microelectronics; October 17-19, 1994; Barcelona, Spain.

Title

Low Temperature Anneal of Electron Irradiation Induced Defects in p-Type Silicon

Publication type

Oral presentation