Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/37980.2
Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics
dc.contributor.author | Mebendale, M. | |
dc.contributor.author | Kotelyanskii, M. | |
dc.contributor.author | Mair, R. | |
dc.contributor.author | Mukundhan, P. | |
dc.contributor.author | Bogdanowicz, J. | |
dc.contributor.author | Teugels, L. | |
dc.contributor.author | Charley, A. L. | |
dc.contributor.author | Kuszewski, P. | |
dc.date.accessioned | 2021-11-02T16:02:22Z | |
dc.date.available | 2021-11-02T16:02:22Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1078-8743 | |
dc.identifier.other | WOS:000631799000022 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37980 | |
dc.source | WOS | |
dc.title | Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bogdanowicz, J. | |
dc.contributor.imecauthor | Teugels, L. | |
dc.contributor.imecauthor | Charley, A. L. | |
dc.contributor.imecauthor | Kuszewski, P. | |
dc.identifier.eisbn | 978-1-7281-5876-1 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.conference | 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) | |
dc.source.conferencedate | AUG 24-26, 2020 | |
dc.source.conferencelocation | Saratoga Springs | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |