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Introduction of a New Carrier System for Collective Die-to-Wafer Hybrid Bonding and Laser-Assisted Die Transfer
dc.contributor.author | Kennes, Koen | |
dc.contributor.author | Phommahaxay, Alain | |
dc.contributor.author | Guerrero, Alice | |
dc.contributor.author | Bauder, Olga | |
dc.contributor.author | Suhard, Samuel | |
dc.contributor.author | Bex, Pieter | |
dc.contributor.author | Iacovo, Serena | |
dc.contributor.author | Liu, Xiao | |
dc.contributor.author | Schmidt, Thomas | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-11-02T16:04:36Z | |
dc.date.available | 2021-11-02T16:04:36Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0569-5503 | |
dc.identifier.other | WOS:000620983200044 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38153 | |
dc.source | WOS | |
dc.title | Introduction of a New Carrier System for Collective Die-to-Wafer Hybrid Bonding and Laser-Assisted Die Transfer | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kennes, Koen | |
dc.contributor.imecauthor | Phommahaxay, Alain | |
dc.contributor.imecauthor | Suhard, Samuel | |
dc.contributor.imecauthor | Bex, Pieter | |
dc.contributor.imecauthor | Iacovo, Serena | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | Bex, Pieter::0000-0003-0896-2514 | |
dc.contributor.orcidimec | Iacovo, Serena::0000-0002-0826-9165 | |
dc.identifier.doi | 10.1109/ECTC32862.2020.00056 | |
dc.identifier.eisbn | 978-1-7281-6180-8 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 296 | |
dc.source.endpage | 302 | |
dc.source.conference | 70th IEEE Electronic Components and Technology Conference (ECTC) | |
dc.source.conferencedate | JUN 03-30, 2020 | |
imec.availability | Under review |
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