dc.contributor.author | Cousin, Seth L. | |
dc.contributor.author | Bargsten, Clayton | |
dc.contributor.author | Rinard, Eric | |
dc.contributor.author | Ward, Rod | |
dc.contributor.author | Hosler, Erik | |
dc.contributor.author | Petersen, Brennan | |
dc.contributor.author | Kapteyn, Henity | |
dc.contributor.author | Vanelderen, Pieter | |
dc.contributor.author | Petersen, John | |
dc.contributor.author | van der Heide, Paul | |
dc.date.accessioned | 2022-01-25T09:23:13Z | |
dc.date.available | 2021-11-02T16:05:07Z | |
dc.date.available | 2022-01-25T09:23:13Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 2160-9020 | |
dc.identifier.other | WOS:000612090002193 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38187.2 | |
dc.source | WOS | |
dc.title | A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vanelderen, Pieter | |
dc.contributor.imecauthor | Petersen, John | |
dc.contributor.imecauthor | van der Heide, Paul | |
dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
dc.identifier.eisbn | 978-1-943580-76-7 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Lasers and Electro-Optics (CLEO) | |
dc.source.conferencedate | MAY 10-15, 2020 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | na | |
imec.availability | Published - imec | |