Publication:
Evaluation of advanced I-line resists for practical 0.5*(l/NA) lithography
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2078 since deposited on 2021-09-29
3last month
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Acq. date: 2026-04-05
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Statistics
Views
2078 since deposited on 2021-09-29
3last month
1last week
Acq. date: 2026-04-05
Citations