Publication:
Conduction and Breakdown Mechanisms in Low-k Spacer and Nitride Spacer Dielectric Stacks in Middle of Line Interconnects
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1782 since deposited on 2021-11-02
Acq. date: 2026-02-26
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Statistics
Views
1782 since deposited on 2021-11-02
Acq. date: 2026-02-26
Citations