Publication:
Conduction and Breakdown Mechanisms in Low-k Spacer and Nitride Spacer Dielectric Stacks in Middle of Line Interconnects
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1784 since deposited on 2021-11-02
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Acq. date: 2026-08-05
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Statistics
Views
1784 since deposited on 2021-11-02
1last month
1last week
Acq. date: 2026-08-05
Citations