Publication:
Dielectric Reliability Study of 21 nm Pitch Interconnects with Barrierless Ru Fill
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1892 since deposited on 2021-11-02
1last month
Acq. date: 2026-10-11
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Statistics
Views
1892 since deposited on 2021-11-02
1last month
Acq. date: 2026-10-11
Citations