Notice

This item has not yet been validated by imec staff.

Notice

This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/38232.2

Fabrication of 2D and 3D Photonic Structures using Focused Ion Beam

Thumbnail
Metadata
Show full item record
Authors
Of, Fabrication; Melkonyan, Henrik; Dahlem, Marcus S.
EISBN
978-1-7281-5891-4
ISSN
2374-0140
Conference
IEEE Photonics Conference (IPC)
Title
Fabrication of 2D and 3D Photonic Structures using Focused Ion Beam
Publication type
Proceedings paper
Collections

Version history

VersionItemDateSummary
220.500.12860/38232.22021-11-22T09:43:09Zvalidation by library/open access desk
120.500.12860/38232*2021-11-02T16:05:48Z

*Selected version