dc.contributor.author | Sloyan, Karen | |
dc.contributor.author | Melkonyan, Henrik | |
dc.contributor.author | Dahlem, Marcus | |
dc.date.accessioned | 2021-11-22T09:45:26Z | |
dc.date.available | 2021-11-02T16:05:48Z | |
dc.date.available | 2021-11-22T09:45:26Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 2374-0140 | |
dc.identifier.other | WOS:000612237500148 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38232.2 | |
dc.source | WOS | |
dc.title | Fabrication of 2D and 3D Photonic Structures using Focused Ion Beam | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Dahlem, Marcus S. | |
dc.contributor.imecauthor | Dahlem, Marcus | |
dc.contributor.orcidimec | Dahlem, Marcus::0000-0002-1373-6709 | |
dc.identifier.eisbn | 978-1-7281-5891-4 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE Photonics Conference (IPC) | |
dc.source.conferencedate | SEP 28-OCT 01, 2020 | |
dc.source.conferencelocation | Vancouver, BC, Canada | |
dc.source.journal | na | |
imec.availability | Published - imec | |