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Fabrication of 2D and 3D Photonic Structures using Focused Ion Beam

dc.contributor.authorOf, Fabrication
dc.contributor.authorMelkonyan, Henrik
dc.contributor.authorDahlem, Marcus S.
dc.date.accessioned2021-11-02T16:05:48Z
dc.date.available2021-11-02T16:05:48Z
dc.date.issued2020
dc.identifier.issn2374-0140
dc.identifier.otherWOS:000612237500148
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38232
dc.sourceWOS
dc.titleFabrication of 2D and 3D Photonic Structures using Focused Ion Beam
dc.typeProceedings paper
dc.contributor.imecauthorDahlem, Marcus S.
dc.identifier.eisbn978-1-7281-5891-4
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceIEEE Photonics Conference (IPC)
dc.source.conferencedateSEP 28-OCT 01, 2020
imec.availabilityUnder review


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220.500.12860/38232.22021-11-22T09:43:09Zvalidation by library/open access desk
120.500.12860/38232*2021-11-02T16:05:48Z

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