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Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
dc.contributor.author | Severi, Joren | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-11-02T16:06:53Z | |
dc.date.available | 2021-11-02T16:06:53Z | |
dc.date.issued | 2020-DEC | |
dc.identifier.other | WOS:000602442500001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38313 | |
dc.source | WOS | |
dc.title | Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography | |
dc.type | Journal article | |
dc.contributor.imecauthor | Severi, Joren | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Severi, Joren::0000-0002-3994-2631 | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.identifier.doi | 10.3390/polym12122971 | |
dc.source.numberofpages | 15 | |
dc.source.peerreview | yes | |
dc.source.journal | POLYMERS | |
dc.identifier.pmid | MEDLINE:33322737 | |
dc.source.issue | 12 | |
dc.source.volume | 12 | |
imec.availability | Under review |
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