Publication:
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
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Acq. date: 2026-04-06
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288 since deposited on 2021-11-02
21last month
5last week
Acq. date: 2026-04-06
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1823 since deposited on 2021-11-02
Acq. date: 2026-04-06
Citations