Publication:

Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography

Date

2020
Journal article
https://doi.org/10.3390/polym12122971
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dc.contributor.authorSeveri, Joren
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorSeveri, Joren
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecSeveri, Joren::0000-0002-3994-2631
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2022-01-25T12:00:01Z
dc.date.available2021-11-02T16:06:53Z
dc.date.available2022-01-25T12:00:01Z
dc.date.issued2020
dc.identifier.doi10.3390/polym12122971
dc.identifier.issn2073-4360
dc.identifier.pmidMEDLINE:33322737
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38313
dc.publisherMDPI
dc.source.issue12
dc.source.journalPOLYMERS
dc.source.numberofpages15
dc.source.volume12
dc.subject.keywordsSURFACE
dc.title

Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography

dc.typeJournal article
dspace.entity.typePublication
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