Publication:
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
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413 since deposited on 2021-11-02
57last month
8last week
Acq. date: 2026-10-06
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1826 since deposited on 2021-11-02
2last month
1last week
Acq. date: 2026-10-06
Citations