Publication:
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
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315 since deposited on 2021-11-02
17last month
4last week
Acq. date: 2026-05-17
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1824 since deposited on 2021-11-02
1last month
Acq. date: 2026-05-17
Citations