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Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
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Authors
Severi, Joren
;
De Simone, Danilo
;
De Gendt, Stefan
DOI
10.3390/polym12122971
ISSN
2073-4360
PMID
MEDLINE:33322737
Issue
12
Journal
POLYMERS
Volume
12
Title
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography
Publication type
Journal article
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2
20.500.12860/38313.2
*
2022-01-25T11:58:13Z
validation by library/open access desk
1
20.500.12860/38313
2021-11-02T16:06:53Z
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