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Isotropic Etches to Enable Forksheet FET Integration

dc.contributor.authorOniki, Yusuke
dc.contributor.authorMertens, Hans
dc.contributor.authorPuttarame Gowda, Pallavi
dc.contributor.authorSebaai, Farid
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2022-02-10T13:16:30Z
dc.date.available2021-12-01T16:09:17Z
dc.date.available2022-02-10T13:16:30Z
dc.date.issued2021
dc.identifier.issnn/a
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38515.2
dc.titleIsotropic Etches to Enable Forksheet FET Integration
dc.typeMeeting abstract
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorPuttarame Gowda, Pallavi
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.numberofpages1
dc.source.peerreviewno
dc.source.conferenceSurface Preparation and Cleaning Conference (SPCC)
dc.source.conferencedate2021
dc.source.conferencelocationVirtual
dc.source.journaln/a
imec.availabilityPublished - imec


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220.500.12860/38515.2*2022-02-10T13:15:58Zvalidation by library/open access desk
120.500.12860/385152021-12-01T16:09:17Z

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