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Isotropic Etches to Enable Forksheet FET Integration
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Authors
Oniki, Yusuke
;
Mertens, Hans
;
Puttarame Gowda, Pallavi
;
Sebaai, Farid
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
;
Horiguchi, Naoto
ISSN
n/a
Conference
Surface Preparation and Cleaning Conference (SPCC)
Journal
n/a
Title
Isotropic Etches to Enable Forksheet FET Integration
Publication type
Meeting abstract
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Conference contributions
Version history
Version
Item
Date
Summary
2
20.500.12860/38515.2
*
2022-02-10T13:15:58Z
validation by library/open access desk
1
20.500.12860/38515
2021-12-01T16:09:17Z
*Selected version
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