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This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/38515.2
Isotropic Etches to Enable Forksheet FET Integration
dc.contributor.author | Oniki, Yusuke | |
dc.contributor.author | Mertens, Hans | |
dc.contributor.author | Puttarame Gowda, Pallavi | |
dc.contributor.author | Sebaai, Farid | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2021-12-01T16:09:17Z | |
dc.date.available | 2021-12-01T16:09:17Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | n/a | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38515 | |
dc.title | Isotropic Etches to Enable Forksheet FET Integration | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Oniki, Yusuke | |
dc.contributor.imecauthor | Mertens, Hans | |
dc.contributor.imecauthor | Puttarame Gowda, Pallavi | |
dc.contributor.imecauthor | Sebaai, Farid | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.source.numberofpages | 1 | |
dc.source.peerreview | no | |
dc.source.conference | Surface Preparation and Cleaning Conference (SPCC) | |
dc.source.conferencedate | 2021 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | n/a | |
imec.availability | Published - imec |
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