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Supervia Process Integration and Reliability Compared to Stacked Vias Using Barrierless Ruthenium
dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Puliyalil, Harinarayanan | |
dc.contributor.author | Versluijs, Janko | |
dc.contributor.author | Lesniewska, Alicja | |
dc.contributor.author | Varela Pedreira, Olalla | |
dc.contributor.author | Baert, Rogier | |
dc.contributor.author | Paolillo, Sara | |
dc.contributor.author | Decoster, Stefan | |
dc.contributor.author | Schleicher, Filip | |
dc.contributor.author | Montero Alvarez, Daniel | |
dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Kesters, Els | |
dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Lorant, Christophe | |
dc.contributor.author | Teugels, Lieve | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Jourdan, Nicolas | |
dc.contributor.author | El-Mekki, Zaid | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | Briggs, Basoene | |
dc.contributor.author | Heijlen, Jeroen | |
dc.contributor.author | Dupas, Luc | |
dc.contributor.author | De Wachter, Bart | |
dc.contributor.author | Vancoille, Eric | |
dc.contributor.author | Webers, Tomas | |
dc.contributor.author | Vats, Hemant | |
dc.contributor.author | Rynders, Luc | |
dc.contributor.author | Cupak, Miroslav | |
dc.contributor.author | Lee, Jae Uk | |
dc.contributor.author | Drissi, Youssef | |
dc.contributor.author | Halipre, Luc | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Van Gompel, Sander | |
dc.contributor.author | Kimura, Yosuke | |
dc.contributor.author | Demonie, Ingrid | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Ercken, Monique | |
dc.contributor.author | Kim, Ryan Ryoung han | |
dc.contributor.author | Trivkovic, Darko | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Jaysankar, Manoj | |
dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-12-16T14:15:40Z | |
dc.date.available | 2021-12-06T02:06:16Z | |
dc.date.available | 2021-12-16T14:15:40Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000717011600197 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38538.2 | |
dc.source | WOS | |
dc.title | Supervia Process Integration and Reliability Compared to Stacked Vias Using Barrierless Ruthenium | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vega-Gonzalez, V. | |
dc.contributor.imecauthor | Puliyalil, H. | |
dc.contributor.imecauthor | Versluijs, J. | |
dc.contributor.imecauthor | Lesniewska, A. | |
dc.contributor.imecauthor | Varela-Pereira, O. | |
dc.contributor.imecauthor | Baert, R. | |
dc.contributor.imecauthor | Paolillo, S. | |
dc.contributor.imecauthor | Decoster, S. | |
dc.contributor.imecauthor | Schleicher, F. | |
dc.contributor.imecauthor | Montero, D. | |
dc.contributor.imecauthor | Bekaert, J. | |
dc.contributor.imecauthor | Kesters, E. | |
dc.contributor.imecauthor | Le, Q. T. | |
dc.contributor.imecauthor | Lorant, C. | |
dc.contributor.imecauthor | Teugels, L. | |
dc.contributor.imecauthor | Heylen, N. | |
dc.contributor.imecauthor | Jourdan, N. | |
dc.contributor.imecauthor | El-Mekki, Z. | |
dc.contributor.imecauthor | van der Veen, M. | |
dc.contributor.imecauthor | Ciofi, I | |
dc.contributor.imecauthor | Briggs, B. | |
dc.contributor.imecauthor | Heijlen, J. | |
dc.contributor.imecauthor | Dupas, L. | |
dc.contributor.imecauthor | De-Wachter, B. | |
dc.contributor.imecauthor | Vancoille, E. | |
dc.contributor.imecauthor | Webers, T. | |
dc.contributor.imecauthor | Vats, H. | |
dc.contributor.imecauthor | Rynders, L. | |
dc.contributor.imecauthor | Cupak, M. | |
dc.contributor.imecauthor | Uk-Lee, J. | |
dc.contributor.imecauthor | Drissi, Y. | |
dc.contributor.imecauthor | Halipre, L. | |
dc.contributor.imecauthor | Charley, A-L | |
dc.contributor.imecauthor | Verdonck, P. | |
dc.contributor.imecauthor | Witters, T. | |
dc.contributor.imecauthor | Gompel, S., V | |
dc.contributor.imecauthor | Kimura, Y. | |
dc.contributor.imecauthor | Demonie, I | |
dc.contributor.imecauthor | Lazzarino, F. | |
dc.contributor.imecauthor | Ercken, M. | |
dc.contributor.imecauthor | Kim, R. | |
dc.contributor.imecauthor | Trivkovic, D. | |
dc.contributor.imecauthor | Croes, K. | |
dc.contributor.imecauthor | Leray, P. | |
dc.contributor.imecauthor | Jaysankar, M. | |
dc.contributor.imecauthor | Wilson, C. | |
dc.contributor.imecauthor | Muroch, G. | |
dc.contributor.imecauthor | Tokei, Z. | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Puliyalil, Harinarayanan | |
dc.contributor.imecauthor | Versluijs, Janko | |
dc.contributor.imecauthor | Lesniewska, Alicja | |
dc.contributor.imecauthor | Varela Pedreira, Olalla | |
dc.contributor.imecauthor | Baert, Rogier | |
dc.contributor.imecauthor | Paolillo, Sara | |
dc.contributor.imecauthor | Decoster, Stefan | |
dc.contributor.imecauthor | Schleicher, Filip | |
dc.contributor.imecauthor | Montero Alvarez, Daniel | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Kesters, Els | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Lorant, Christophe | |
dc.contributor.imecauthor | Teugels, Lieve | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Jourdan, Nicolas | |
dc.contributor.imecauthor | El-Mekki, Zaid | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | Briggs, Basoene | |
dc.contributor.imecauthor | Heijlen, Jeroen | |
dc.contributor.imecauthor | Dupas, Luc | |
dc.contributor.imecauthor | De Wachter, Bart | |
dc.contributor.imecauthor | Vancoille, Eric | |
dc.contributor.imecauthor | Webers, Tomas | |
dc.contributor.imecauthor | Vats, Hemant | |
dc.contributor.imecauthor | Rynders, Luc | |
dc.contributor.imecauthor | Cupak, Miroslav | |
dc.contributor.imecauthor | Lee, Jae Uk | |
dc.contributor.imecauthor | Drissi, Youssef | |
dc.contributor.imecauthor | Halipre, Luc | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | Van Gompel, Sander | |
dc.contributor.imecauthor | Kimura, Yosuke | |
dc.contributor.imecauthor | Demonie, Ingrid | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Ercken, Monique | |
dc.contributor.imecauthor | Kim, Ryan Ryoung han | |
dc.contributor.imecauthor | Trivkovic, Darko | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.imecauthor | Jaysankar, Manoj | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Puliyalil, Harinarayanan::0000-0002-9749-5307 | |
dc.contributor.orcidimec | Lesniewska, Alicja::0000-0003-3863-065X | |
dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
dc.contributor.orcidimec | Schleicher, Filip::0000-0003-3630-7285 | |
dc.contributor.orcidimec | Montero Alvarez, Daniel::0000-0001-9966-0399 | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | Lorant, Christophe::0000-0001-7363-9348 | |
dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.contributor.orcidimec | Lee, Jae Uk::0000-0002-9434-5055 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.identifier.doi | 10.1109/IEDM13553.2020.9372096 | |
dc.identifier.eisbn | 978-1-7281-8888-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 12-18, 2020 | |
dc.source.conferencelocation | San Francisco, CA, USA | |
dc.source.journal | na | |
imec.availability | Published - imec |
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