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Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck

dc.contributor.authorTokei, Zsolt
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorO'Toole, Martin
dc.contributor.authorCroes, Kristof
dc.contributor.authorBaert, Rogier
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorWilson, Chris
dc.contributor.authorPark, Seongho
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSwerts, Johan
dc.contributor.authorPaolillo, Sara
dc.contributor.authorDecoster, Stefan
dc.contributor.authorMao, Ming
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorVersluijs, Janko
dc.contributor.authorBlanco, Victor
dc.contributor.authorErcken, Monique
dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHeylen, Nancy
dc.contributor.authorTeugels, Lieve
dc.contributor.authorDevriendt, Katia
dc.contributor.authorStruyf, Herbert
dc.contributor.authorMorin, Pierre
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCiofi, Ivan
dc.contributor.authorGupta, Anshul
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorVanstreels, Kris
dc.contributor.authorNa, Myung Hee
dc.date.accessioned2021-12-21T13:12:09Z
dc.date.available2021-12-06T02:06:35Z
dc.date.available2021-12-21T13:12:09Z
dc.date.issued2020
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000717011600015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38547.2
dc.sourceWOS
dc.titleInflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
dc.typeProceedings paper
dc.contributor.imecauthorTokei, Zs
dc.contributor.imecauthorVega, V.
dc.contributor.imecauthorMurdoch, G.
dc.contributor.imecauthorO'Toole, M.
dc.contributor.imecauthorCroes, K.
dc.contributor.imecauthorBaert, R.
dc.contributor.imecauthorVan der Veen, M.
dc.contributor.imecauthorAdelmann, C.
dc.contributor.imecauthorSoulie, J. P.
dc.contributor.imecauthorBoemmels, J.
dc.contributor.imecauthorWilson, C.
dc.contributor.imecauthorPark, S. H.
dc.contributor.imecauthorSankaran, K.
dc.contributor.imecauthorPourtois, G.
dc.contributor.imecauthorSweerts, J.
dc.contributor.imecauthorPaolillo, S.
dc.contributor.imecauthorDecoster, S.
dc.contributor.imecauthorMao, M.
dc.contributor.imecauthorLazzarino, F.
dc.contributor.imecauthorVersluijs, J.
dc.contributor.imecauthorBlanco, V
dc.contributor.imecauthorErcken, M.
dc.contributor.imecauthorKesters, E.
dc.contributor.imecauthorLe, Q-T
dc.contributor.imecauthorHolsteyns, F.
dc.contributor.imecauthorHeylen, N.
dc.contributor.imecauthorTeugels, L.
dc.contributor.imecauthorDevriendt, K.
dc.contributor.imecauthorStruyf, H.
dc.contributor.imecauthorMorin, P.
dc.contributor.imecauthorJourdan, N.
dc.contributor.imecauthorVan Elshocht, S.
dc.contributor.imecauthorCiofi, I
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorZahedmanesh, H.
dc.contributor.imecauthorVanstreels, K.
dc.contributor.imecauthorNa, M. H.
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorO'Toole, Martin
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorMao, Ming
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorNa, Myung Hee
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.identifier.doi10.1109/IEDM13553.2020.9371903
dc.identifier.eisbn978-1-7281-8888-1
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 12-18, 2020
dc.source.conferencelocationSan Francisco, CA, USA
dc.source.journalna
imec.availabilityPublished - imec


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220.500.12860/38547.2*2021-12-21T12:57:31Zvalidation by library/open access desk
120.500.12860/385472021-12-06T02:06:35Z

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