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Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
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Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
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Date
2020
Proceedings Paper
https://doi.org/10.1109/IEDM13553.2020.9371903
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tokei, Zsolt
;
Vega Gonzalez, Victor
;
Murdoch, Gayle
;
O'Toole, Martin
;
Croes, Kristof
;
Baert, Rogier
;
van der Veen, Marleen
;
Adelmann, Christoph
;
Soulie, Jean-Philippe
;
Boemmels, Juergen
;
Wilson, Chris
;
Park, Seongho
;
Sankaran, Kiroubanand
;
Pourtois, Geoffrey
;
Swerts, Johan
;
Paolillo, Sara
;
Decoster, Stefan
;
Mao, Ming
;
Lazzarino, Frederic
;
Versluijs, Janko
;
Blanco, Victor
;
Ercken, Monique
;
Kesters, Els
;
Le, Quoc Toan
;
Holsteyns, Frank
;
Heylen, Nancy
;
Teugels, Lieve
;
Devriendt, Katia
;
Struyf, Herbert
;
Morin, Pierre
;
Jourdan, Nicolas
;
Van Elshocht, Sven
;
Ciofi, Ivan
;
Gupta, Anshul
;
Zahedmanesh, Houman
;
Vanstreels, Kris
;
Na, Myung Hee
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na
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1843
since deposited on 2021-12-06
Acq. date: 2025-12-11
Citations
Metrics
Views
1843
since deposited on 2021-12-06
Acq. date: 2025-12-11
Citations