Publication:
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Vega Gonzalez, Victor | |
| dc.contributor.author | Murdoch, Gayle | |
| dc.contributor.author | O'Toole, Martin | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Baert, Rogier | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.contributor.author | Soulie, Jean-Philippe | |
| dc.contributor.author | Boemmels, Juergen | |
| dc.contributor.author | Wilson, Chris | |
| dc.contributor.author | Park, Seongho | |
| dc.contributor.author | Sankaran, Kiroubanand | |
| dc.contributor.author | Pourtois, Geoffrey | |
| dc.contributor.author | Swerts, Johan | |
| dc.contributor.author | Paolillo, Sara | |
| dc.contributor.author | Decoster, Stefan | |
| dc.contributor.author | Mao, Ming | |
| dc.contributor.author | Lazzarino, Frederic | |
| dc.contributor.author | Versluijs, Janko | |
| dc.contributor.imecauthor | Tokei, Zs | |
| dc.contributor.imecauthor | Vega, V. | |
| dc.contributor.imecauthor | Murdoch, G. | |
| dc.contributor.imecauthor | O'Toole, M. | |
| dc.contributor.imecauthor | Croes, K. | |
| dc.contributor.imecauthor | Baert, R. | |
| dc.contributor.imecauthor | Van der Veen, M. | |
| dc.contributor.imecauthor | Adelmann, C. | |
| dc.contributor.imecauthor | Soulie, J. P. | |
| dc.contributor.imecauthor | Boemmels, J. | |
| dc.contributor.imecauthor | Wilson, C. | |
| dc.contributor.imecauthor | Park, S. H. | |
| dc.contributor.imecauthor | Sankaran, K. | |
| dc.contributor.imecauthor | Pourtois, G. | |
| dc.contributor.imecauthor | Sweerts, J. | |
| dc.contributor.imecauthor | Paolillo, S. | |
| dc.contributor.imecauthor | Decoster, S. | |
| dc.contributor.imecauthor | Mao, M. | |
| dc.contributor.imecauthor | Lazzarino, F. | |
| dc.contributor.imecauthor | Versluijs, J. | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
| dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
| dc.contributor.orcidimec | Sankaran, Kiroubanand::0000-0001-6988-7269 | |
| dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
| dc.contributor.orcidimec | Decoster, Stefan::0000-0003-1162-9288 | |
| dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
| dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
| dc.contributor.orcidimec | Morin, Pierre::0000-0002-4637-496X | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.date.accessioned | 2021-12-21T13:12:09Z | |
| dc.date.available | 2021-12-06T02:06:35Z | |
| dc.date.available | 2021-12-21T13:12:09Z | |
| dc.date.issued | 2020 | |
| dc.identifier.doi | 10.1109/IEDM13553.2020.9371903 | |
| dc.identifier.eisbn | 978-1-7281-8888-1 | |
| dc.identifier.issn | 2380-9248 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38547 | |
| dc.publisher | IEEE | |
| dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
| dc.source.conferencedate | DEC 12-18, 2020 | |
| dc.source.conferencelocation | San Francisco, CA, USA | |
| dc.source.journal | na | |
| dc.source.numberofpages | 4 | |
| dc.title | Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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