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Publication:

Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck

Date

2020
Proceedings Paper
https://doi.org/10.1109/IEDM13553.2020.9371903
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Author(s)

Tokei, Zsolt  
;
Vega Gonzalez, Victor  
;
Murdoch, Gayle  
;
O'Toole, Martin  
;
Croes, Kristof  
;
Baert, Rogier  
;
van der Veen, Marleen  
;
Adelmann, Christoph  
;
Soulie, Jean-Philippe
;
Boemmels, Juergen  
;
Wilson, Chris  
;
Park, Seongho  
;
Sankaran, Kiroubanand  
;
Pourtois, Geoffrey  
;
Swerts, Johan  
;
Paolillo, Sara  
;
Decoster, Stefan  
;
Mao, Ming  
;
Lazzarino, Frederic  
;
Versluijs, Janko  
;
Blanco, Victor  
;
Ercken, Monique  
;
Kesters, Els  
;
Le, Quoc Toan  
;
Holsteyns, Frank  
;
Heylen, Nancy  
;
Teugels, Lieve  
;
Devriendt, Katia  
;
Struyf, Herbert  
;
Morin, Pierre  
;
Jourdan, Nicolas  
;
Van Elshocht, Sven  
;
Ciofi, Ivan  
;
Gupta, Anshul  
;
Zahedmanesh, Houman  
;
Vanstreels, Kris  
;
Na, Myung Hee  

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na

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1842 since deposited on 2021-12-06
Acq. date: 2025-10-27

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1842 since deposited on 2021-12-06
Acq. date: 2025-10-27

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