Publication:

Wafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab

Date

2020
Proceedings Paper
https://doi.org/10.1109/IEDM13553.2020.9371926
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Author(s)

Asselberghs, Inge  
;
Smets, Quentin  
;
Schram, Tom  
;
Groven, Benjamin  
;
Verreck, Devin  
;
Afzalian, Aryan  
;
Arutchelvan, Goutham  
;
Gaur, Abhinav  
;
Cott, Daire  
;
Maurice, Thibaut  
;
Brems, Steven  
;
Kennes, Koen  
;
Phommahaxay, Alain  
;
Dupuy, Emmanuel  
;
Radisic, Dunja  
;
de Marneffe, Jean-Francois  
;
Thiam, Arame  
;
Li, Waikin  
;
Devriendt, Katia  
;
Huyghebaert, Cedric  
;
Lin, Dennis  
;
Caymax, Matty  
;
Morin, Pierre  
;
Radu, Iuliana  

Journal

na

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1919 since deposited on 2021-12-06
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Acq. date: 2026-04-05

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