dc.contributor.author | Franco, Jacopo | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Vandooren, Anne | |
dc.contributor.author | Kimura, Yosuke | |
dc.contributor.author | Nyns, Laura | |
dc.contributor.author | Wu, Zhicheng | |
dc.contributor.author | El-Sayed, A-M | |
dc.contributor.author | Jech, M. | |
dc.contributor.author | Waldhoer, D. | |
dc.contributor.author | Claes, Dieter | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Afanas'ev, V. | |
dc.contributor.author | Stesmans, A. | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Grasser, T. | |
dc.contributor.author | Kaczer, Ben | |
dc.date.accessioned | 2021-12-16T11:32:46Z | |
dc.date.available | 2021-12-06T02:06:35Z | |
dc.date.available | 2021-12-16T11:32:46Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000717011600163 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38549.2 | |
dc.source | WOS | |
dc.title | Atomic Hydrogen Exposure to Enable High-Quality Low-Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Franco, J. | |
dc.contributor.imecauthor | de Marneffe, J-F | |
dc.contributor.imecauthor | Vandooren, A. | |
dc.contributor.imecauthor | Kimura, Y. | |
dc.contributor.imecauthor | Nyns, L. | |
dc.contributor.imecauthor | Wu, Z. | |
dc.contributor.imecauthor | Claes, D. | |
dc.contributor.imecauthor | Arimura, H. | |
dc.contributor.imecauthor | Ragnarsson, L-A | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.contributor.imecauthor | Linten, D. | |
dc.contributor.imecauthor | Kaczer, B. | |
dc.contributor.imecauthor | Franco, Jacopo | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Vandooren, Anne | |
dc.contributor.imecauthor | Kimura, Yosuke | |
dc.contributor.imecauthor | Nyns, Laura | |
dc.contributor.imecauthor | Wu, Zhicheng | |
dc.contributor.imecauthor | Claes, Dieter | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
dc.contributor.orcidimec | Vandooren, Anne::0000-0002-2412-0176 | |
dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.identifier.doi | 10.1109/IEDM13553.2020.9372054 | |
dc.identifier.eisbn | 978-1-7281-8888-1 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 12-18, 2020 | |
dc.source.conferencelocation | San Francisco, CA, USA | |
dc.source.journal | na | |
imec.availability | Published - imec | |