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Atomic Hydrogen Exposure to Enable High-Quality Low-Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking
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Authors
Franco, Jacopo
;
de Marneffe, Jean-Francois
;
Vandooren, Anne
;
Kimura, Yosuke
;
Nyns, Laura
;
Wu, Zhicheng
;
El-Sayed, A-M
;
Jech, M.
;
Waldhoer, D.
;
Claes, Dieter
;
Arimura, Hiroaki
;
Ragnarsson, Lars-Ake
;
Afanas'ev, V.
;
Stesmans, A.
;
Horiguchi, Naoto
;
Linten, Dimitri
;
Grasser, T.
;
Kaczer, Ben
DOI
10.1109/IEDM13553.2020.9372054
EISBN
978-1-7281-8888-1
ISSN
2380-9248
Conference
IEEE International Electron Devices Meeting (IEDM)
Journal
na
Title
Atomic Hydrogen Exposure to Enable High-Quality Low-Temperature SiO2 with Excellent pMOS NBTI Reliability Compatible with 3D Sequential Tier Stacking
Publication type
Proceedings paper
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2
20.500.12860/38549.2
*
2021-12-16T11:26:53Z
validation by library/open access desk
1
20.500.12860/38549
2021-12-06T02:06:35Z
*Selected version
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