dc.contributor.author | Stephenson, Robert | |
dc.contributor.author | De Wolf, Peter | |
dc.contributor.author | Trenkler, Thomas | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Jansen, Philippe | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-14T11:41:06Z | |
dc.date.available | 2021-10-14T11:41:06Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3854 | |
dc.source | IIOimport | |
dc.title | Practicalities and limitations of scanning capacitance microscopy for routine IC characterisation | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 411 | |
dc.source.endpage | 419 | |
dc.source.conference | 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors | |
dc.source.conferencedate | 28/03/1999 | |
dc.source.conferencelocation | Research Triangle Park, NC USA | |
imec.availability | Published - open access | |