Show simple item record

Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers

dc.contributor.authorRengo, Gianluca
dc.contributor.authorPorret, Clément
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRosseel, Erik
dc.contributor.authorAyyad, Mustafa
dc.contributor.authorMorris, Richard
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorLoo, Roger
dc.contributor.authorVantomme, André
dc.date.accessioned2022-05-02T10:13:13Z
dc.date.available2021-12-06T14:19:54Z
dc.date.available2022-05-02T10:13:13Z
dc.date.issued2021
dc.identifier.issnna
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38571.2
dc.titleEffect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers
dc.typeProceedings paper
dc.contributor.imecauthorRengo, Gianluca
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorAyyad, Mustafa
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.identifier.doi10.1149/10404.0167ecst
dc.source.numberofpages14
dc.source.peerreviewno
dc.source.beginpage167
dc.source.conference240th ECS Meeting
dc.source.conferencedate2021/10/10 - 2021/10/14
dc.source.conferencelocationVirtual
dc.source.journalECS Transactions
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
Revised_G_Rengo_ECS_Trans_Fall ...
Size:
498.1Kb
Format:
Unknown
Description:
Accepted version
View/open

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/38571.2*2022-05-02T10:10:29Zvalidation by library/open access desk
120.500.12860/385712021-12-06T14:19:54Z

*Selected version