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Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers
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Authors
Rengo, Gianluca
;
Porret, Clément
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Ayyad, Mustafa
;
Morris, Richard
;
Pourtois, Geoffrey
;
Loo, Roger
;
Vantomme, André
DOI
10.1149/10404.0167ecst
ISSN
na
Conference
240th ECS Meeting
Journal
ECS Transactions
Title
Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers
Publication type
Proceedings paper
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2
20.500.12860/38571.2
*
2022-05-02T10:10:29Z
validation by library/open access desk
1
20.500.12860/38571
2021-12-06T14:19:54Z
*Selected version
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