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Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers
dc.contributor.author | Vantomme, André | |
dc.contributor.author | Rengo, Gianluca | |
dc.contributor.author | Porret, Clément | |
dc.contributor.author | Hikavyy, Andriy | |
dc.contributor.author | Rosseel, Erik | |
dc.contributor.author | Ayyad, Mustafa | |
dc.contributor.author | Morris, Richard | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Loo, Roger | |
dc.date.accessioned | 2021-12-06T14:19:54Z | |
dc.date.available | 2021-12-06T14:19:54Z | |
dc.date.issued | 1/10/2021 | |
dc.identifier.issn | - | |
dc.identifier.issn | na | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38571 | |
dc.title | Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rengo, Gianluca | |
dc.contributor.imecauthor | Porret, Clément | |
dc.contributor.imecauthor | Hikavyy, Andriy | |
dc.contributor.imecauthor | Rosseel, Erik | |
dc.contributor.imecauthor | Ayyad, Mustafa | |
dc.contributor.imecauthor | Morris, Richard | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.orcidimec | https://orcid.org/ 0000-0002-3410-6466 | |
dc.contributor.orcidimec | Porret, Clément | |
dc.contributor.orcidimec | Hikavyy, Andriy | |
dc.contributor.orcidimec | Morris, Richard | |
dc.contributor.orcidimec | Pourtois, Geoffrey | |
dc.contributor.orcidimec | Loo, Roger | |
dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
dc.contributor.orcidimec | Morris, Richard::0000-0002-0902-7088 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.identifier.doi | 10.1149/10404.0167ecst | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | no | |
dc.source.conference | 240th ECS Meeting | |
dc.source.conferencedate | 2021/10/10 - 2021/10/14 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | ECS Transactions | |
imec.availability | Published - open access |