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Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)
Publication:
Characterization of Doping and Activation Processes Using Differential Hall Effect Metrology (DHEM)
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Date
2021
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Joshi, Abhijeet
;
Rengo, Gianluca
;
Porret, Clément
;
Lin, Kun-Lin
;
Chang, Chia-He
;
Basol, Bulent
Journal
ECS Transactions
Abstract
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Downloads
783
since deposited on 2021-12-15
77
last month
11
last week
Acq. date: 2026-08-19
Views
1786
since deposited on 2021-12-15
2
last month
Acq. date: 2026-08-19
Citations