Authors

Sugihara, Takashi; Van Roey, Frieda; Goethals, Mieke; Ronse, Kurt; Van den hove, Luc

Issue

1_4

Journal

Microelectronic Engineering

Volume

46

Title

Resist surface investigations for reduction of line-edge-roughness in top surface imaging technology

Publication type

Journal article

Embargo date

9999-12-31